May 2002Newport - New FocusRequest Info
A family of closed-loop motorized stages for increased efficiency in manufacturing applications has been introduced by New Focus Inc. These movable platforms offer accurate, high-resolution motion control and placement for precision processes such as semiconductor wafer positioning and fiber optic alignment. Included with the stages are high-resolution encoders for positioning >50 nm and built-in limit switches for protecting the surrounding setup. Speeds >100 mm/s and bidirectional repeatability <150 nm enable users to move the stages quickly and accurately.