Jan 2003Oxford Applied Research Ltd.Request Info
Incorporates Sublimator and Phosphorous Conversion Buffer Zones NEWARK, N.J., Jan. 14 -- OAR introduces its QC-500 cracker, which enables the generation of atomic species from solid phosphorous or arsenic. The source incorporates a sublimator zone as well as a red-to-white phosphorous conversion buffer zone to avoid pressure bursts seen in conventional two-zone cracker systems.
The sublimated material passes through a high-purity all-quartz valve into the RF-excited cracker zone. In contrast to thermal cracking, the RF plasma acts to dissociate the material to the more reactive atomic form allowing a higher growth rate and dopant incorporation to be achieved. The RF cracking zone can also be used to generate atomic nitrogen, oxygen and hydrogen.
The QC-500 is UHV compatible with an NW63CF mounting and comes with an RF power supply, manual matching unit and valve/actuator.
General applications include phosphorous and arsenic cracking, doping, bulk growth, oxide and nitride growth and improving sticking efficiencies.
For more information, visit: www.oaresearch.com; e-mail: Steve Rothstein, sales/marketing manager, SteveOAR@aol.com; or call 866-NOW-4OAR (toll-free); fax: 973-622-3423.
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