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Photonics Spectra
Mar 2003
Veeco Instruments Inc.Request Info
MEMS METROLOGY Veeco Metrology Group has added dynamic MEMS measurement capability to its Wyko NT1100 optical profiler. This option allows three-dimensional characterization of microdevices as they actuate for assessing their functionality and measuring in- and out-of-plane dimensions. It includes a custom illumination source, electronics and SureVision analysis software, which can be used to determine parameters such as resonant frequency, radius of curvature, shape/distortion and deflection. The system captures a series of 3-D measurements and generates a video of the device as it cycles through its range of motion. The Wyko NT1100 uses noncontact, white light interferometry to measure features from 0.1 to 2 mm in height.


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