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MEMS METROLOGY

Photonics Spectra
Mar 2003
Veeco Instruments Inc.Request Info
 
MEMS METROLOGY Veeco Metrology Group has added dynamic MEMS measurement capability to its Wyko NT1100 optical profiler. This option allows three-dimensional characterization of microdevices as they actuate for assessing their functionality and measuring in- and out-of-plane dimensions. It includes a custom illumination source, electronics and SureVision analysis software, which can be used to determine parameters such as resonant frequency, radius of curvature, shape/distortion and deflection. The system captures a series of 3-D measurements and generates a video of the device as it cycles through its range of motion. The Wyko NT1100 uses noncontact, white light interferometry to measure features from 0.1 to 2 mm in height.


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