Mar 2003Rudolph Technologies Inc.Request Info
An automated inspection system for 200- and 300-mm wafers has been released by Rudolph Technologies Inc. The WaferView provides macrodefect inspection of wafer surfaces at throughputs of >100 wafers per hour. The company says the system's proprietary full-color image processing detects 95% of photolithography defects and correctly classifies them 85% of the time. The WaferView has a library of classified defects and can be programmed with new defect classes, enabling users to customize defect detection.