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POSITIONING STAGES

Photonics Spectra
Jan 1998
SCHNEEBERGER Inc.Request Info
 
Schneeberger Inc. has added two high-precision X-Y stages to its line. The AA12 and AA15 stages are based on low mass and high stiffness by incorporating the company's MRC 15 series Monorail guideways. The tables are manufactured from aluminum. The AA12 and -15 stages have linear encoders with 0.5-µm resolution. They offer positional accuracy of 3 µm and repeatability of 1 µm. They are suitable for applications such as semiconductor wafer inspection.


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