3-D SURFACE PROFILER
Jun 2003Taylor Hobson Ltd.Request Info
The Talysurf CCI 3000 3-D surface profiler from Taylor Hobson Ltd. features a resolution of 0.1 Å over a 100-µm gauge range and repeatability of 0.03 Å rms. Suitable for MEMS, semiconductor and data storage applications, this measurement device uses a patented algorithm to find the coherence peak position of an interference pattern produced by a selectable bandwidth light source. It can measure glass, liquid inks, and metal and surfaces with reflectivity between 0.3% and 100%. The noncontact profiler accommodates components up to 300 x 300 mm and specimen areas up to 7.2 x 7.2 mm.