LARGE SPECTRAL MAPS
Sep 2003McPhersonRequest Info
A test chamber for mapping large samples and 193- and 157-nm transmission measurements has been unveiled by McPherson Inc. For use with its VUVaS vacuum ultraviolet test station, it operates from 120 to 380 nm. The station enables users to map absorbance, transmittance and reflectance over the full area of a wafer. With the large chamber, users can measure and map transmission and reflectance samples over areas as large as 350 mm in diameter. Of the custom-built chambers, the horizontally oriented version has no top cover and can be used in conjunction with a pellicle-handling robot.