Sep 2003IPG Photonics, Microsystems Div.Request Info
The ChromaDice UV diode-pumped solid-state laser system provides high-speed blue LED wafer scribing with typical yields greater than 99%, according to its producer, JPSA Laser. The system cuts a square chip with consistently narrow widths as small as 5 µm. The process is faster than mechanical scribing and has a throughput of up to eight wafers per hour with low impact on LED performance. With automation, the system takes less than 1 min to load and align, and a single operator can run multiple systems.