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ULTRACLEAN ACTUATOR

Photonics Spectra
Jun 2004
Newport - New FocusRequest Info
 
ULTRACLEAN ACTUATOR Suitable for ultraclean semiconductor and scientific applications, the Ultra Picomotor actuator from New Focus Inc. is designed to minimize contamination and outgassing in environments such as the vacuum- and the extreme-UV. Essentially a motorized screw, the device is appropriate for precision motion control and beam steering in clean environments with vacuum pressures as low as 10–9 t. It offers <30-nm resolution over a 3-mm travel range as well as long-term set-and-hold stability. The Ultra can be incorporated into OEM designs for linear actuation and into optical mounts and stages for tip-tilt beam-steering adjustments.


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