Jul 2004PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) LP has unveiled a long-travel piezo scanning and nanomanipulation system that offers integrated capacitive feedback and closed-loop control that, the company says, boost linearity by up to three orders of magnitude over conventional stages. The P-563.3CD PIMars provides 300 × 300 × 300-µm travel in the X-Y-Z axes, with nanometer resolution. It has a 66-mm2 clear aperture and a parallel kinematics design that features only one moving part. Response is in the millisecond range. Available versions include ultrahigh-vacuum, invar, superinvar and titanium.