SURFACE AND THICKNESS MEASUREMENT
Aug 2004LumetricsRequest Info
With all-fiber construction and no moving parts, the DI 330 multilayer thickness and surface measurement system from Lumetrics Inc. performs noncontact online measurement of optics, optical assemblies and coated optics. The dual-interferometer engine uses a 1310-nm LED to create reflections off single- and multilayer surfaces, and a 1550-nm internal laser measures the reflections and converts them to thickness and surface profiles. The system measures in a single online view from 12 µm to 5 mm with 100-Hz real-time sampling speed, 200-nm accuracy and 30-nm resolution. Software for data interpretation and statistical analysis is included.