ELECTRON BEAM MODULES
Aug 2004Spellman High Voltage Electronics Corp.Request Info
The EBM series triode modules have been developed by Spellman High Voltage Electronics Corp. to drive electron beam columns for scanning electron microscopes. In a package made compact by surface-mount and proprietary encapsulation technologies, the modules comprise an accelerator that is programmable to 30 kV at 300 µA and floating bias and filament sources referenced to the accelerator's voltage. Drift is ≤8 ppm over 3 min after warmup, and all outputs produce low ripple.