Request InfoAerotech Ltd.WaferMax Z from Aerotech Ltd. is a motorized vertical lift submicron positioning stage based on direct-drive, cog-free linear motor technology. Straightness/flatness accuracy is ±2 µm, and resolution is 0.83 nm. Pitch, roll and yaw are all 20 arc sec, and travel range is 5 mm. The system, measuring <250 × 210 mm including the motor and encoder connectors, achieves maximum speed of 4 mm/s, with error-mapped and -calibrated positioning accuracy of ±1.5 µm and bidirectional repeatability of ±0.5 µm.See full productRelated content from Photonics MediaPRODUCTSPhotonics.com 6/1/2023Alignment StagesThe XYR-15-60-01 and XYR-15-60-04 XY-Theta Alignment Stages from Optimal Engineering Systems Inc. feature sub-µm resolution with 15 mm of travel in the X and Y axes. The devices feature...Photonics.com 6/16/2022Rotary TableThe TruMotion rotary table from Rotary Precision Instruments UK Ltd. verifies small or medium circular parts with high accuracy. 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