Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
share
Email Facebook Twitter Google+ LinkedIn

EUV REFLECTOMETER

Photonics Spectra
Oct 2004
SCHOTT AG, Lithotec Div.
 
EUV REFLECTOMETER Schott Lithotec AG has installed a high-precision EUV reflectometer suitable for cleanrooms in its facility for the production of photomask blanks, enabling the qualification of EUV photomask blanks in-house for 32-nm node technology and below. The company says that the device provides high throughput, accuracy, sensitivity and reproducibility. It eliminates the need for external qualification at synchrotrons and fulfills the requirements for mass production of microchips in the EUV lithography market.


Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2017 Photonics Media
x Subscribe to Photonics Spectra magazine - FREE!