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THIN-FILM MEASUREMENT

Photonics Spectra
Oct 2004
Ocean Optics Inc.Request Info
 
NanoCalc, a thin-film reflectometry system unveiled by Ocean Optics Inc., can measure three layers 10 nm to 250 µm thick in less than 1 s. It is suitable for online thickness measurement of silicon-nitride and photoresist films; of rough metal, ceramic and plastic substrates; and of coatings in the semiconductor, automotive, packaging and biotechnology industries. The included software enables curve-fitting and accuracy measurements, and provides a library of refractive index and other values for various materials.


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