Nov 2004piezosystem jena GmbHRequest Info
The PXY 16 OEM piezoscanner introduced by piezosystem jena GmbH is a two-axis linear device with a positioning and scanning range of up to 16 µm. Its parallel-kinematics-order design provides higher stiffness in all three perpendicular axes and higher responsiveness than serial-order designs. The solid-flexure-hinge design of the monolithic guidance keeps the trajectory free of mechanical play and friction. To avoid creep and hysteresis, the system can be equipped with a high-resolution measurement sensor that, combined with the controller in closed-loop operation, provides stability, linearity, repeatability and accuracy. The compact design and the raster drill holes for mounting facilitate integration of the stage into existing assemblies. Vacuum and cryogenic versions are available upon request.