VACUUM COATING SYSTEM
Jan 2005Edwards Vacuum Inc.Request Info
Combining a 600-mm-wide coating chamber and a high-throughput vacuum pumping system, the TF600 from BOC Edwards delivers increased productivity and flexibility in researching, developing and producing substrates used in the semiconductor, laser and scientific industries. Placed at the rear of the chamber to provide faster pumpdown, the pumping system features options such as diffusion, turbomolecular and cryogenic high-vacuum pumps, and the XDS 35i dry scroll pump for backing and chamber roughing. Process options include resistance evaporation, electron beam, RF, DC and pulsed DC sputtering. The system is suitable for applications such as lift-off and ion-beam processing.