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STYLUS PROFILER

Photonics Spectra
Jan 2005
Tamar Technology (See Rudolph Technologies)Request Info
 
STYLUS PROFILER The HRT 3000 released by Tamar Technology is a noncontact optical stylus profiler designed for MEMS, semiconductor, LCD flat panel display, and medical device test and manufacturing applications. It features a traditional microscope for conventional X-Y metrology and provides Z data in real time. Proprietary advanced signal processing software accurately measures high-aspect-ratio wafer isolation and MEMS trenches, panel or substrate flatness, wafer bumps and critical dimensions. The system scans from 50 to 2000 µm with 0.03- to 1.0-µm resolution, and is available as a turnkey tool or as an OEM measurement probe for existing equipment or in-process applications.


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