MOTORIZED STEPPER STAGE
May 1998Prior Scientific Instruments Ltd.Request Info
A precision programmable motorized stepper stage from Prior Scientific provides a 10 3 8.5-in. travel and comes with all fittings for a user's specific microscope or optical system. The H116 stage is for applications involving large items such as semiconductor wafers, flat panel displays, wafer masks and printed circuit boards. The step size is from 0.1 to 10.0 µm, depending on stage and controller configuration. Optional linear scales provide positioning with repeatabilities to 0.5 µm and accuracies to 3 µm.