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Photonics Spectra
Mar 2005
Tamar Technology (See Rudolph Technologies)Request Info
OPTICAL PROFILER Designed for MEMS, semiconductor, LCD flat panel display, and medical device test and manufacturing applications, the HRT 3000 noncontact optical stylus profiler features a traditional microscope for X-Y metrology and provides Z-data in real time. Manufactured by Tamar Technology, the device includes proprietary signal-processing software that measures high-aspect-ratio wafer isolation and MEMS trenches, panel or substrate flatness, wafer bumps, as well as bumped and thin wafer thickness. It has a 50- to 2000-µm scan range with resolutions from 0.03 to 1.0 µm and is supplied as a turnkey tool or as an OEM measurement probe for existing equipment or in-process applications.


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An instrument consisting essentially of a tube 160 mm long, with an objective lens at the distant end and an eyepiece at the near end. The objective forms a real aerial image of the object in the focal plane of the eyepiece where it is observed by the eye. The overall magnifying power is equal to the linear magnification of the objective multiplied by the magnifying power of the eyepiece. The eyepiece can be replaced by a film to photograph the primary image, or a positive or negative relay...
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