MIRROR SUBSTRATES
Berliner Glas GmbH
Berliner Glas KGaA has developed a manufacturing process to reduce the weight and thermal expansion of mirror substrates, especially those used in microlithography. The company says that the advantages of its method are easier handling, holders and adjusters that need less stability, reduced forces in dynamic systems, and reduced deformation by temperature change and heat. The technique involves machining from a solid block of material and precise shaping by CNC technology.
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Published: April 2005