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NANOPOSITIONING

Photonics Spectra
May 2005
piezosystem jena GmbHRequest Info
 
NANOPOSITIONING The nanoX series of nanopositioning stages launched by piezosystem jena GmbH feature an active bidirectional gear design that reduces the push/pull force ratio to up to roughly 1:1 without affecting the trajectory. Both stroke direction senses of the stages are controlled by the high-pressure force generation of the company's piezoelectrical actuators. The stages, which provide a total travel range of up to 480 µm with sub-nanometer resolution, have applications in imaging, mask alignment, scanning microscopy, materials sciences and metrology nanopositioning.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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