Jun 2005IPG Photonics, Microsystems Div.Request Info
J P Sercel Associates (JPSA) has introduced the IX-3000, a high-throughput Class 1 ultraviolet excimer-based laser step-and-scan ablation system designed for micromachining, drilling and laser processing of materials. The high-accuracy mask imaging system operates primarily at 248 and 193 nm, with submicron optical resolution and structural accuracy, and 0.2- to 0.3-µm repeatability. It is granite-based, vibration- and thermal-damped for stability, and has a large field of view with on-target fluence of up to 2 J/cm2. Options include cassette-to-cassette wafer handling, panel and robotics handling, and tape and reel systems.