PIEZOELECTRIC ACTUATOR
piezosystem jena GmbHRequest Info
The Mici, an actuator designed to improve positioning accuracy for linear stages, has been unveiled by piezosystem jena GmbH. Clamped between the measuring stage and the micrometer drive, the device allows adjustment of a stage in a range of up to 180 µm. Preadjustment is made with a measuring screw, and fine adjustments performed by the Mici enable accuracy of better than 35 nm. An optional sensor can be used for increased positioning stability and reproducibility. The actuator is controlled by a voltage signal or via proprietary piezo drives, and can be modified for use with micrometer screws from any supplier.
https://www.piezosystem.com
/Buyers_Guide/piezosystem_jena_GmbH/c11842
Published: July 2005
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