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Nanoresolution Parallel and Serial Kinematic Robotic Stages
Jul 2005
ALIO Industries Corp.Request Info
ALIO's 3-axis tripod and 6-axis hexapod robotic systems promise to revolutionize the manufacturing processes of products requiring nanometer resolution and repeatability. The parallel kinematic stages offer an impressive 10-nanometer resolution with the ability to revolve around a virtual point in space, coupled with speeds of up to 200 mm/sec. ALIO's broad line of linear and rotary stages can be configured into various serial kinematic structures. These precision stages can be modified or reengineered to meet specific customer needs. ALIO's robotic products form the basis of the next generation of automated nanopositioning systems for the most demanding applications in photonics, packaging, test, measurement, MEMS, medical and semiconductor manufacturing. All products are available for atmospheric, cleanroom and vacuum environments. The ALIO Advantage: All stages use patented ceramic servomotors and high-resolution linear optical encoders. Our drive technology offers speeds from 1 micron/sec up to 250mm/sec, incremental step down to 5nm, ~1ms settling time, high stage resonance frequency and no servo dither and no hysteresis. These are notable advantages over traditional linear and rotary DC servomotors when working with photonic alignments or nano-resolution inspection applications.


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The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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