Aug 2005PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
For photonics packaging automation, quality control, test equipment and micromachining applications, PI (Physik Instrumente) LP has released the M-110, M-111 and M-112 micropositioning systems. The compact, ultrahigh-resolution, motorized translation stages provide linear motion of 5, 15 and 25 mm and deliver 50-nm minimum incremental motion. When equipped with piezo drives, they perform fast scanning at 1-nm resolution. The stages can be combined to form X-Y, X-Z and X-Y-Z systems for multiaxis positioning and alignment. Leadscrews and ball screws are offered, driven by stepper motors and closed-loop servomotors.