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TURBO PUMPS

Photonics Spectra
Aug 2005
Pfeiffer Vacuum Inc.Request Info
 
TURBO PUMPS Pfeiffer Vacuum Inc. has introduced high-capacity, high-throughput turbo pumps that are designed for high-particulate processes in semiconductor, glass, industrial coating and R&D applications. Pumping speeds range from 1200 to 2100 l/s for light gases, and throughput is up to two standard liters per minute for heavy gases. The rotor/bearing design results in mean time before failure of better than 200,000 h. The pumps use an integrated controller with interchangeable peripherals and cables and are available with IP54-rated power supplies in a variety of configurations.


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