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Piezo-Driven, High-Speed Steering Mirrors
Sep 2005
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
To Improve the Performance of Optics and Imaging Systems
AUBURN, Mass., Sept. 19 -- Nanopositioning and nanomechanics product manufacturer PI (Physik Instrumente) offers a variety of piezo-driven, high-speed steering mirrors for use in image/beam stabilization, resolution enhancement, scanning and tracking applications. The latest designs provide multiaxis motion with high bandwidth, submicroradian resolution and optical deflection ranges up to 100 mrad and were designed to improve the performance of optics and imaging systems in a variety of applications ranging from lithography to biomedical instrumentation.
PI says its steering mirrors are based on a parallel-kinematics design with a single moving platform and coplanar rotational axes, for jitter-free, multiaxis motion. In addition, the company says, the single-pivot-point design provides better linearity and avoids the drawback of polarization rotation, common with galvo scanners, where two single-axis systems need to be stacked to provide XY motion.

Compared to stacked, multiaxis systems, the parallel-kinematics design provides faster response and better linearity with equal dynamics for all axes in a smaller package, according to PI. The flexure-guided, piezo-driven platforms can provide higher accelerations than voice coil actuators, enabling step response times in the submillisecond range, the company says. Multiple integrated, absolute measuring position sensors feed the platform position information back to a piezo controller for enhanced linearity and stability. A variety of analog and digital controllers in bench-top, OEM-board and rack-mount designs are available to drive the units.

For more information, visit:; e-mail:

Physik Instrumente LP
16 Albert St.
Auburn, MA 01501
Phone:(508) 832-3456
Fax: (508) 832-0506


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