Oct 2005IPG Photonics, Microsystems Div.Request Info
A large-diameter turning mirror mount for UV laser processing has been unveiled by J.P. Sercel Associates (JPSA). The industrial-grade vacuum-UV device turns a 157-, 193- or 248-nm excimer laser beam at a 90° angle and directs it through a beam delivery system. The gimbal-mounted, rectangular mirror pivots exactly at the front surface, providing zero crosstalk between the X and Y adjustment axes, and is placed in a spring-loaded premount for stability and low stress. The system features a 50 × 50-mm clear aperture and is equipped with differential micrometers that are separated by a nickel bellows.