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NANOPOSITIONING STAGES

Photonics Spectra
Nov 2005
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
 
NANOPOSITIONING STAGES The P-628 series manufactured by PI (Physik Instrumente) LP comprises compact, piezo-driven, closed-loop nanopositioning stages that, via their friction-free and stiff flexure system and ceramic-encapsulated Picma multilayer piezoactuators, provide a travel range of up to 950 µm. The stages include a variety of 32-bit digital controllers with ID-chip recognition for easy interchangeability. The absolute measuring, high-bandwidth capacitive sensors achieve 0.03% position accuracy, and resolution is <1 nm. Applications include nanometrology, white-light interferometry, microscopy, spectroscopy and precision alignment of optics.


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