Nov 2005Renishaw plc, Spectroscopy Products Div.Request Info
The RLD10 differential measurement head, used with Renishaw plcs RLE system, is a fiber-optic-launched laser interferometer encoder for precision motion applications in vacuum and other controlled environments. The interferometer is positioned via three location pins on the exterior of the process chamber, and the laser beam enters through an AR-coated view port. Integral beam-steering devices provide independent ±1° pitch-and-yaw adjustment for the measurement and reference beams. Systems using a standard laser unit and the differential interferometer produce digital quadrature output with resolution to 10 nm.