Jan 2006LIMO Lissotschenko Mikrooptik GmbHRequest Info
As replacements for diffractive optical elements, Lissotschenko Mikrooptik (Limo) GmbH has released a line of monolithic high-precision refractive optical elements that illuminate hexagonal entrance pupils in mask illumination systems. The lens arrays have a high fill factor, efficiency of better than 95% and no hot spots. They can be made from fused silica or CaF2 and are suitable for all excimer laser wavelengths. Nonuniformity of illumination is <12%. The refractive optical elements are compatible with holders for the diffractive types.