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ExciLife-193 Coatings for OEMs
Feb 2006
Princeton InstrumentsRequest Info
ACTON, Mass., Feb. 24, 2006 -- Princeton Instruments/Acton, a provider of high-end optics and optical coatings, has introduced its ExciLife-193 high-durability 193-nm optical coatings for OEMs.
"The new ExciLife-193 coatings represent an important and exciting breakthrough in vacuum ultraviolet (UV) coating technology," said Michael Case, vice president of research and development. "They combine high durability with exceptional laser performance, which makes them the ideal choice for use in next-generation LASIK systems, immersion lithography, material processing, industrial marking and wafer exposure systems."
With a 45-degree incidence angle, ExciLife-193 coatings are guaranteed to provide >97-percent reflectance at 193 nm, certified in PI/Acton’s in-house metrology laboratory. They also pass MIL-SPEC adhesion, abrasion and humidity, making them some of the most robust UV coatings commercially available.
In lifetime testing, the MaxR@45 degrees design was tested at 300mj/cm2, 100 and 200Hz for 2 million laser pulses without damage or change in reflectivity. For immersion lithography applications, the ExciLife-193 was placed in DI-water for 1 week and then laser tested at >500mj/cm2, 100Hz, 100,000 pulses without damage. The new coatings are available in OEM volumes and can be optimized for use at incidence angles from 0 to 45 degrees.
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coatingsExciLife-193immersion lithographyindustrialindustrial markingLASIK systemsmaterial processingmetrologyoptical coatingsopticsPrinceton Instruments/ActonProductsvacuum ultraviolet coatingwafer exposure systemsWafers

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