ExciLife-193 Coatings for OEMs
Feb 2006Princeton InstrumentsRequest Info
ACTON, Mass., Feb. 24, 2006 -- Princeton Instruments/Acton, a provider
of high-end optics and optical coatings, has introduced its
ExciLife-193 high-durability 193-nm optical coatings for OEMs.
"The new ExciLife-193 coatings represent an important and
exciting breakthrough in vacuum ultraviolet (UV) coating technology,"
said Michael Case, vice president of research and development. "They
combine high durability with exceptional laser performance, which makes
them the ideal choice for use in next-generation LASIK systems,
immersion lithography, material processing, industrial marking and
wafer exposure systems."
With a 45-degree incidence angle, ExciLife-193 coatings are
guaranteed to provide >97-percent reflectance at 193 nm, certified
in PI/Acton’s in-house metrology laboratory. They also pass MIL-SPEC
adhesion, abrasion and humidity, making them some of the most robust UV
coatings commercially available.
In lifetime testing, the MaxR@45 degrees design was tested at
300mj/cm2, 100 and 200Hz for 2 million laser pulses without damage or
change in reflectivity. For immersion lithography applications, the
ExciLife-193 was placed in DI-water for 1 week and then laser tested at
>500mj/cm2, 100Hz, 100,000 pulses without damage. The new coatings
are available in OEM volumes and can be optimized for use at incidence
angles from 0 to 45 degrees.
For more information, visit: www.piacton.com; e-mail: email@example.com