May 2006PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
A six-axis piezo nanopositioning and scanning system has been unveiled by PI (Physik Instrumente) LP. The P587.6CD offers six degrees of freedom, digital dynamic linearization, active trajectory error compensation, millisecond responsiveness, nanometer resolution and travel ranges of up to 800 µm/10,000 µrad. An integrated autocalibration function enables fast setup and interchangeability of controllers and nanomechanisms. The parallel-metrology design has multiple sensors monitoring the moving platform against a stationary reference for improved multiaxis precision. The parallel-kinematics single-module design reduces inertia and the center of gravity for faster response and settling times.