CONFOCAL OPTICAL PENS
Jun 2006Micro Photonics Inc.Request Info
For profilometry, microtopography, roughness, autofocus vibrometry, in-line inspection quality control and thickness measurements, Micro Photonics Inc. has released a line of confocal chromatic optical pens. Their modular design allows 30 configurations for specific depth of field, spot size, working distance, object slope and photometric efficiency. Users can choose among five magnifiers (3.3- to 29-mm focal lengths) and six chromatic lenses (130-μm to 27-mm depths of field). Based on white-light chromatic aberration, the pens achieve maximum axial resolution of 5 nm, 20-nm accuracy, and 1.1-μm lateral and 5-nm vertical resolution.