OLS3000 LEXT Microscope

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A new laser confocal technology has been announced by Olympus Micro-Imaging that the company said fills the gap between conventional high resolution optical microscopes and scanning electron microscopes (SEMs).

Called LEXT for laser scanning confocal technology, it is designed for applications requiring ultraprecise measurement and observation, such as microelectromechanical systems fabrication, advanced materials processing, nanoscale production and semiconductor wafer manufacturing. The new technology, introduced in the OLS3000 LEXT microimaging system, features sub-micron imaging with 0.12 µm and 0.01 µm Z resolution and accurate three-dimensional measurement capability.

To speed up measurement and observation tasks in high volume manufacturing applications, the OLS3000 requires no sample preparation or vacuum pumpdown -- samples can be placed directly on the microscope stage for both three-dimensional observation and measurement in real time. Magnification power from 120X to 14,400X is ideal for researchers working between the limits of conventional optical microscopes and SEMs. The new LEXT microscopes enable every user to make quicker, more accurate sample analyses, all based on strict traceability systems, Olympus Micro-Imaging said.

Because the LEXT microscope uses a laser for pinpoint surface profile measurements, resolution much higher than conventional optical microscopes can be obtained with just as many different observation methods. Brightfield, darkfield and differential interference contrast (DIC) microscopy techniques are possible in both white light and laser confocal imaging modes. The new confocal laser DIC mode is especially useful for highlighting subtle textural variations during surface analysis.

Olympus Micro-Imaging has also introduced the LEXT-IR, a near-infrared system operating at a wavelength of 1310 nm for nondestructive, high-resolution observation and measurement through silicon materials. For more information, visit: www.olympusmicroimaging.com; e-mail: [email protected]

Olympus Micro-Imaging
Olympus Surgical & Industrial America Inc.
One Corporate Dr.
Orangeburg, NY 10962
Phone: (845) 398-9400
Fax: (845) 398-9444
Web site: www.olympusmicroimaging.com
E-mail: [email protected]

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Published: June 2006