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DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers

HybrYX Air-Bearing Stage

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MKS/Newport
IRVINE, Calif., July 31, 2006 -- Newport Corp. has announced the latest addition to its DynamYX family of air-bearing systems -- the HybrYX single-plane XY hybrid stage. This latest motion control solution from Newport provides customers with all the advantages of a single-plane air-bearing stage at a much lower cost, the company said. The HybrYX stage is an ideal solution for semiconductor applications including front-end wafer inspection and lithography and can be used for many flat panel inspection and processing applications. "Our new HybrYX stage is very attractive solution for semiconductor equipment manufacturers...See full product

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