Aug 2006Renishaw Inc.Request Info
Designed for precise positioning and process control in semiconductor and electronics manufacturing, the RG2 (20 μm) and RG4 (40 μm) optical encoders launched by Renishaw Inc. are suitable for lithography, alignment, reticle inspection, thermal processing, wafer fabrication, wire and die bonding, and X-Y stages. Cut-and-tape metal scales make them less fragile than glass encoders, and the read heads and filters are designed to reduce bulkiness, hysteresis and wear. Advances include 20% to 30% higher speeds, 50-nm resolution available directly from the read heads, and electronic improvements that increase reliability. Additional output choices provide compatibility with a wider range of controllers, and high-resolution versions have an overspeed alarm as well as the standard setup LED and low-signal alarm.