Aug 2006Rudolph Technologies Inc.Request Info
Metrology systems for measuring thin transparent films have been introduced by Rudolph Technologies Inc. The S3000 (300 mm) and S2000 (200 mm) use proprietary fifth-generation Focus beam ellipsometry technology that incorporates long-life laser light sources for high accuracy, long-term stability, a small spot size and easy tool-to-tool matching. Built on a proprietary Vanguard platform, the systems include a Microsoft Windows XP-based interface. They offer optional deep-UV and visible reflectometry capabilities.