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ROTARY STAGES

Photonics Spectra
Aug 2006
Aerotech Inc.Request Info
 
Aerotech Inc.’s ABRS series rotary air-bearing stages are suitable for wafer inspection, high-precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication. The stages range in height from 80 to 110 mm, with clear apertures from 8 to 75 mm in diameter. They use a proprietary S-series slotless, brushless motor with an advanced magnetic circuit design to produce high torque output with minimal heat generation. An optical encoder is included which, when coupled with the company’s feedback multipliers and controls, achieves resolution of <0.03 arc sec.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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