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Bristol Instruments, Inc. - 872 Series High-Res 4/24 LB

ROTARY STAGES

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Aerotech Inc.
Aerotech Inc.’s ABRS series rotary air-bearing stages are suitable for wafer inspection, high-precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication. The stages range in height from 80 to 110 mm, with clear apertures from 8 to 75 mm in diameter. They use a proprietary S-series slotless, brushless motor with an advanced magnetic circuit design to produce high torque output with minimal heat generation. An optical encoder is included which, when coupled with the company’s feedback multipliers and controls, achieves...See full product

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