Sep 2006Veeco Instruments Inc.Request Info
The automated Wyko NT3300 optical profiler has been launched by Veeco Instruments Inc. Its dynamic microelectromechanical systems (MEMS) measurement option nondestructively measures MEMS devices as they actuate. The system uses a proprietary stroboscopic illuminator and synchronization electronics to capture 3-D data and to generate a video of the sample device as it cycles through its range of motion. Wyko Vision software locates features of interest and performs 3-D analyses such as determining resonant frequency and shape/distortion, and characterizing deflection. The system measures features 0.1 nm to 2 mm high with angstrom resolution, and has a programmable X-Y stage and software for fast measurement of large surface areas. Built-in tip/tilt eliminates the need to reposition the probe for successive scans.