Sep 1998OPTRA Inc.Request Info
The NanoGrid interferometric encoder products from Optra Inc. are for high-precision X-Y measurements in production environments. They are suitable for semiconductor wafer position and motion control. Model A has an electronic interpolation to 0.3 nm on an ISA bus-compatible PC board and delivers repeatability better than ±5 nm and a speed capability of 700 mm/s. Model B produces selectable A-quad-B outputs to 20-nm resolution using high-performance ASICs.