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CONFOCAL MICROSCOPE

Photonics Spectra
Oct 1998
Nikon Instruments Inc.Request Info
 
The Optiphot 200C from Nikon is a confocal microscope system for integrated circuit production and inspection. It uses confocal, bright- and dark-field, differential interference contrast and epifluorescence imaging techniques. Optiphot features ultralow dispersion glass in its patented chromatic aberration-free infinity lenses and eyepieces for resolving power, image flatness and color reproduction. An internal 2:1 zoom with built-in clickstops extends image magnification. The company's wafer loaders can be integrated for more demanding inspections.


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