Request InfoNavitar Inc.ROCHESTER, N.Y., Oct. 25, 2006 -- Over the years, feature sizes on semiconductor wafers, data storage devices and microelectronic components have continued to shrink well below the wavelength of visible light. Navitar has responded to this increasing need to further extend resolution limits for optical inspection with the NanoVue 248 nm 4X deep UV zoom lens. The NanoVue optical system works in the deep ultraviolet (DUV) light, enabling detection and characterization of yield-critical defects while effectively doubling the resolution limit of conventional visible light microscopes, the company said. Navitar supplies...See full productRelated content from Photonics MediaPRODUCTSVision Spectra Autumn 2023 IssueMetrology Software PackageAs part of the AT SolutionPackage from AT Automation Technology GmbH, the MetrologyPackage simplifies the integration, configuration, and commissioning of 3D sensors designed for metrology. 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