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FILM METROLOGY

Photonics Spectra
Oct 1998
Rudolph Technologies Inc.Request Info
 
tFILM A transparent film metrology system from Rudolph Technologies Inc., called the SpectraLaser UTF, provides guaranteed subangstrom thickness accuracy of ±0.5 A and tool-to-tool matching of ±0.1 A. The system can characterize ultrathin films and ultrathin film stacks. It is suitable for semiconductor wafer manufacturing applications where all chips must have identical film thicknesses.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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