Mar 2007INFICONRequest Info
Quartz crystals from Inficon are available in 5 and 6 MHz in alloy, gold and silver. The gold crystals are suitable for most applications, while the silver ones are recommended for processes with high heat loads, and the alloy ones, for optical coating with dielectric materials and for semiconductor processes with high-stress materials. The crystals are produced to stringent specifications. Their AT-cut planoconvex design reduces errors in deposition rate and thickness by minimizing mode hopping. To ensure longevity and stable and accurate rate control, each crystal is examined for resistance, frequency, curvature and visual conformity. Package choices include a compact box, a flat-pack carousel or a cleanroom-compatible dispenser.