Wafer Handler Modules
Mar 2007McBain SystemsRequest Info
CHATSWORTH, Calif., March 20, 2007 -- McBain Instruments, a supplier of microscopes and microscopy systems to the industrial, biomedical and research and development markets, announces a newly designed lab tool, the Wafer Handler WL150 and WL200 series modules.
The innovative semiautomatic wafer inspection device offers high throughput at 750 WPH with smooth, reliable and safe handling of wafers up to 200 mm. The new, portable apparatus is an updated and upgraded system that replaces the "Ultrastation" wafer handling system, no longer available from Irvine Optical, the company said.
Economical and compact, McBain Instruments' new wafer cassettes accommodate either 3 to 6 in. (WL150) or 5 to 8 in. (WL200) wafer sizes. The Class 1-cleanroom-compatible Wafer Handler also features "smart" stepper motors for the drive axis, motors that provide stall and fault detection, linear stages for smooth and repeatable action and vacuum-touch end effectors with sensing capabilities. The easy-to-mount device facilitates safer wafer handling with user-defined inspection positions and a strategic spring-loaded counterbalance to support the majority of the load without overloading the Z-axis mechanism.
The standard VESA interface makes integration seamless with virtually all major microscopes, optics and inspection devices,the company said. The complete system is provided with an intuitive HMI (human-machine interface) control box and numeric keypad. Ideal for labs and automated work station tasks that require reliable and safe wafer handling and loading, it is in full production and shipping now. McBain's Wafer Handler modules are available with a 12-month parts and labor warranty.
McBain is the exclusive southwestern regional industrial dealer for Leica Microsystems and a distributor of Yokogawa's line of real-time confocal systems. For more information, visit: www.mcbaininstruments.com; e-mail: firstname.lastname@example.org
9601 Variel Ave.
Chatsworth, CA 91311
Phone: (818) 998-2702
Fax: (818) 718-0363