Apr 2007Gigaphoton Inc.Request Info
Gigaphoton Inc. has expanded its GT series of argon-fluoride light sources with the GT61A excimer laser. The device has an emission wavelength of 193 nm, a repetition rate of 6000 Hz and pulse energy of 10 mJ. It is designed for lithography tools with numerical apertures of 1.3 and higher. The company says that the laser provides a 30% improvement in spectral bandwidth compared with its predecessors.