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P-733.3CD XYZ Nanopositioning System
Aug 2007
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
PI — a maker of nanopositioning and piezo-based precision motion-control equipment for semiconductor, nanotechnology and photonics applications — offers the new P-733.3CD, XYZ nanopositioning and scanning system.

Typical applications include: Surface profiling, metrology/interferometry, scanning microscopy, image processing/stabilization, semiconductor testing and alignment nanomanipulation.

  • Parallel Metrology with Capacitive Sensors for up to 0.1 nm Resolution
  • Parallel Kinematics for Better Multiaxis Accuracy and Dynamics
  • Frictionless Lightweight Flexure Design for Sub-Millisecond Response
  • Long-Life Piezo Actuators, 100 x 100 x 10 µm Travel Range
These high-resolution piezo stages are designed for materials research, high-resolution microscopy, ultraprecise alignment and imaging applications. The parallel-kinematics design (only one common moving platform for XYZ) reduces the moved mass, and enables -- together with the stiff design --higher operating speeds than other piezo scanning stages. A parallel metrology position sensor design provides highly accurate position information in all axes.


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actuatorBiophotonicsimagingIndustry EventsmetrologyMicroscopymotion-controlnanoNanopositioningP-733.3CDphotonicsPIpizeopositioningProductsscanningsemiconductorSensors & DetectorsXYZ

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